Monolithic PMUT-on-CMOS ultrasound system for single pixel acoustic imaging
2021 IEEE 34th international conference on micro electro …, 2021•ieeexplore.ieee.org
This paper presents a fully operational integrated ultrasound transceiver based on a single
piezoelectric micromachined ultrasonic transducer (PMUT) monolithically fabricated with a
0.13 μm complementary metal oxide semiconductor (CMOS) analog front-end circuitry. The
single PMUT-on-CMOS transducer produces ultrasound waves in liquid environment with
competitive values, as actuator: 71 Pa* mm* V-1 as well as provides a high reception
sensitivity (20 V/MPa). These two characteristics allow for an efficient single-pixel pulse …
piezoelectric micromachined ultrasonic transducer (PMUT) monolithically fabricated with a
0.13 μm complementary metal oxide semiconductor (CMOS) analog front-end circuitry. The
single PMUT-on-CMOS transducer produces ultrasound waves in liquid environment with
competitive values, as actuator: 71 Pa* mm* V-1 as well as provides a high reception
sensitivity (20 V/MPa). These two characteristics allow for an efficient single-pixel pulse …
This paper presents a fully operational integrated ultrasound transceiver based on a single piezoelectric micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 μm complementary metal oxide semiconductor (CMOS) analog front-end circuitry. The single PMUT-on-CMOS transducer produces ultrasound waves in liquid environment with competitive values, as actuator: 71 Pa*mm*V -1 as well as provides a high reception sensitivity (20 V/MPa). These two characteristics allow for an efficient single-pixel pulse-echo system. From time-of-flight experiments with this single PMUT-on-CMOS transceiver, a SNR dependence of 25 dB/z (z, axial distance) is achieved, allowing efficient pulse-echo imaging at 2 mm axial distances. These measurements demonstrate the capabilities of the single PMUT-on-CMOS transceivers for pixel sized acoustic imaging system. In this paper a full characterization of the single PMUT-on-CMOS transceiver is provided.
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