This article presents a fully integrated ultrasound system based on a single piezoelectric
micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 μm
complementary metal oxide semiconductor (CMOS) process analog front-end circuitry. The
PMUT consists of an aluminum nitride, AlN, squared device with 80 μm side that resonates
at 2.4 MHz in liquid environment. The monolithic integration of the PMUT with the CMOS
circuitry allows a reduction of the parasitic capacitance, a reduction of the electronic noise …

This article presents a fully integrated ultrasound system based on a single piezoelectric
micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 µm
complementary metal oxide semiconductor (CMOS) process analog front-end circuitry. The
PMUT consists of an aluminum nitride, AlN, squared device with 80 µm side that resonates
at 2.4 MHz in liquid environment. The monolithic integration of the PMUT with the CMOS
circuitry allows a reduction of the parasitic capacitance, a reduction of the electronic noise …