Multifunctional mid-infrared photonic switch using a MEMS-based tunable waveguide coupler

Q Qiao, MS Yazici, B Dong, X Liu, C Lee, G Zhou - Optics Letters, 2020 - opg.optica.org
Q Qiao, MS Yazici, B Dong, X Liu, C Lee, G Zhou
Optics Letters, 2020opg.optica.org
We demonstrate a multifunctional photonic switch on silicon-on-insulator platform operating
at the mid-infrared wavelength range (3.85–4.05 µm) using suspended waveguides with sub-
wavelength cladding and a micro-electro-mechanical systems (MEMS) tunable waveguide
coupler. Leveraging the flip-chip bonding technology, a top wafer acting as the electrode is
assembled above the silicon-on-insular wafer to enable the electrostatic actuation.
Experimental characterizations for the functions of the proposed device include (1) an …
We demonstrate a multifunctional photonic switch on silicon-on-insulator platform operating at the mid-infrared wavelength range (3.85–4.05 µm) using suspended waveguides with sub-wavelength cladding and a micro-electro-mechanical systems (MEMS) tunable waveguide coupler. Leveraging the flip-chip bonding technology, a top wafer acting as the electrode is assembled above the silicon-on-insular wafer to enable the electrostatic actuation. Experimental characterizations for the functions of the proposed device include (1) an optical attenuator with 25 dB depth using DC voltage actuation, (2) a 1×2 optical switch with response time of 8.9 µs and −3dB bandwidth up to 127 kHz using AC voltage actuation, and (3) an on-chip integrated light chopper with the comparable performance of a commercial rotating disc light chopper.
opg.optica.org
以上显示的是最相近的搜索结果。 查看全部搜索结果