New thermally actuated microscnner—design, analysis and simulations
A Zarzycki, WL Gambin - Recent Advances in Mechatronics, 2007 - Springer
Recent Advances in Mechatronics, 2007•Springer
A design of a new thermally actuated microscanner is proposed. The device is capable of
two-dimensional scans for optical raster imaging. It consists of a micromirror and four
thermal actuators. A special location of the mirror with respect to the cantilever beams
assures the high precision of scanning action. The distance of the centre of the mirror from
the light source is the same during the whole scanning process. It allows projecting an
image with fewer distortions. The rest position of the mirror and resonant frequency for raster …
two-dimensional scans for optical raster imaging. It consists of a micromirror and four
thermal actuators. A special location of the mirror with respect to the cantilever beams
assures the high precision of scanning action. The distance of the centre of the mirror from
the light source is the same during the whole scanning process. It allows projecting an
image with fewer distortions. The rest position of the mirror and resonant frequency for raster …
Abstract
A design of a new thermally actuated microscanner is proposed. The device is capable of two-dimensional scans for optical raster imaging. It consists of a micromirror and four thermal actuators. A special location of the mirror with respect to the cantilever beams assures the high precision of scanning action. The distance of the centre of the mirror from the light source is the same during the whole scanning process. It allows projecting an image with fewer distortions. The rest position of the mirror and resonant frequency for raster scanning action are investigated.
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