Methods of measuring thickness of a material using cross capacitance. The method
generally includes applying a time-varying signal to a first pad and monitoring a response of
a capacitor formed by the first pad, a spaced apart second pad, and the material. The pads
may be permanently affixed to the material, in spaced relation to each other. Based on the
response, a capacitance of the capacitor is determined. The material may be homogenous
or heterogeneous, and has dielectric properties. Because the material acts as a dielec tric …