Amorphous hydrogenated silicon/crystalline silicon (a‐Si:H/c‐Si) heterojunction solar cells are investigated and optimized with regard to efficiency and simplicity of processing. Starting with a survey of a‐Si:H/c‐Si heterojunction solar cell results from the literature, we describe the fabrication steps of our a‐Si:H/c‐Si technology and analyze the electronic device properties by quantum efficiency, current–voltage, admittance, and capacitance–voltage measurements. The open‐circuit voltage and the fill factor of the a‐Si:H/c‐Si heterojunction solar cells under investigation are limited by recombination in the neutral zone of the crystalline Si absorber. Recombination at the a‐Si:H/c‐Si‐interface is subsidiary in respect of the limitation of the open‐circuit voltage. Our best n‐type a‐Si:H/p‐type c‐Si solar cell prepared without high‐efficiency features such as back‐surface field or surface texturing has an independently confirmed efficiency of 14.1% and an open‐circuit voltage of 655 mV. Copyright © 2001 John Wiley & Sons, Ltd.