Finding the physical positions of sensors after random deployment is called localization. One of the localization techniques is to use a mobile anchor that moves along a path to help unknown nodes to locate themselves automatically. In this paper, we study the impact of three essential parameters on the performance metrics of path planning models for mobile anchor-based localization to help configure the localization system for achieving better results. These parameters include path degree, mobile communication range and distance estimation errors. For this purpose, we analyzed four path planning methods: SCAN, HILBERT, Zcurve and LMAT in terms of localization accuracy, localization ratio, path length and cost of communication. Simulation results confirm the importance of path parameterization in the quality of the localization system with a mobile anchor node.