Preparation of Gd2O3 doped CeO2 thin films by oxy-acetylene combustion assisted aerosol-chemical vapor deposition technique on various substrates and zone …
H Song, C Xia, G Meng, D Peng - Thin Solid Films, 2003 - Elsevier
A modified oxy-acetylene combustion assisted aerosol-chemical vapor deposition technique
operated in atmosphere has been developed and employed to deposit Gd2O3 doped CeO2
thin films with nitrate precursors in the substrate temperature range of 900–1400° C. The
compositions of the films are very close to those of mixed precursor solution. The
microstructures of the films are strictly influenced by experimental parameters such as
substrate temperature, source solution composition and substrate type. A structural zone …
operated in atmosphere has been developed and employed to deposit Gd2O3 doped CeO2
thin films with nitrate precursors in the substrate temperature range of 900–1400° C. The
compositions of the films are very close to those of mixed precursor solution. The
microstructures of the films are strictly influenced by experimental parameters such as
substrate temperature, source solution composition and substrate type. A structural zone …
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