… processing of metal oxide thin films have increased notably. This has enabled the direct
integration of metal oxide … of the use of these processes with reduced energy consumption. More …

… Atomic layer deposition technique is able to grow conformal thin films over high aspect ratio
structures. This article reviews the various aspects of oxides grown by this method including …

… oxide (TCO) and in gas sensor devices. This paper compares ZnO films grown using two
methods designed for the production of … from ZnO thin films prepared by the sol–gel method, as …

… method to produce nanocrystalline thin films of tungsten oxide. The most important factor
influencing the shape and microstructure of the tungstite crystallites in the deposited films …

… The crystalline structure of bismuth oxide films strongly depends on the nucleation and growth
processes at film–substrate interface and is mainly determined by the crystalline structure …

… The most commonly used metal oxide thin film devices for ozone detection are In 2 O 3 -…
The film thickness was measured with the stylus method. Undoped ZnO thin films were grown on …

… ALD is a gas-phase thin-film deposition method that is unique because the film growth
proceeds through self-limiting surface reactions (10–13). As a consequence, ALD offers excellent …

… , as many thin films share a number of features in all steps of the production process,
characterization, … Oxide thin films can also be deposited if oxygen is introduced in the chamber as …

… principles of thin-film technology , including deposition processes, … This method is most
commonly used where oxide films are … at the substrate to form the oxide. The impingement ratio K, …

… Thin films can also be obtained by pyrolysis of an aerosol (pyrosol process), generally
produced by the ultrasonic spraying of an organometallic solution.R4 The conditions to be …