Reliability of next-generation field-effect transistors with transition metal dichalcogenides

YY Illarionov, AJ Molina-Mendoza… - 2018 IEEE …, 2018 - ieeexplore.ieee.org
2018 IEEE International Reliability Physics Symposium (IRPS), 2018ieeexplore.ieee.org
We perform a detailed reliability study of MoS 2, MoSe 2, MoTe 2 and WS 2 field-effect
transistors fabricated on the same SiO 2/Si substrate. First we analyze the sensitivity of these
devices to adsorbate-type trapping sites on top of the channel and show that their
contribution can be minimized at high temperatures, which leads to a domination of charge
trapping by oxide traps. Then we compare the high-temperature dynamics of the hysteresis
and bias-temperature instabilities for different devices. Our results show that the observed …
We perform a detailed reliability study of MoS 2 , MoSe 2 , MoTe 2 and WS 2 field-effect transistors fabricated on the same SiO 2 /Si substrate. First we analyze the sensitivity of these devices to adsorbate-type trapping sites on top of the channel and show that their contribution can be minimized at high temperatures, which leads to a domination of charge trapping by oxide traps. Then we compare the high-temperature dynamics of the hysteresis and bias-temperature instabilities for different devices. Our results show that the observed differences can be partially explained by the alignment of known defect bands in SiO 2 relative to the conduction and valence band edges of the two-dimensional channel materials. As such, our study provides strong fundamental insights into the reliability of these new technologies and opens further perspectives on how to reach commercial quality standards.
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