Resonance-based mems temperature sensors for temperature compensation of mems capacitive accelerometer
G Demirhan - 2016 - open.metu.edu.tr
The idea of the proposed study is using the resonator structure as a temperature sensor
together with controller circuitry. That is to say, the study consists of two branches; one is PI
controller output which would be used as a temperature sensor and the other is preamplifier
output which would be used as carrier generator to the accelerometer readout circuitry. The
proposed resonator is analyzed in detail in terms of dynamics, simulation models and
theoretical investigations. The implemented resonator is shown to satisfy the estimated …
together with controller circuitry. That is to say, the study consists of two branches; one is PI
controller output which would be used as a temperature sensor and the other is preamplifier
output which would be used as carrier generator to the accelerometer readout circuitry. The
proposed resonator is analyzed in detail in terms of dynamics, simulation models and
theoretical investigations. The implemented resonator is shown to satisfy the estimated …
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