… the device structure to heat treat it. 2. A method of making a semiconductor device including
… substrate by ion bombardment ion implantation techniques, and then electrically activating …

… This paper reviews the topic of the device parameter variations using semiconductor-based
manufacturing of micro- and nano-devices. There is considerable misunderstanding about …

… We define the desired trajectory vftf as relative to the same linearized starting point used for
… shown the role that control methodologies can play in semiconductor device manufacturing. …

… tools used for semiconductor device, process, equipment, and factory design can be
thought of as components of a de facto system of design for semiconductor manufacturing (DFSM). …

… This article proposes an intelligent monitoring system for semiconductor manufacturing
equipment, which determines spec-in or spec-out for a wafer in process, using Internet of Things–…

… of process. This paper intends to let more people realize the importance of semiconductor
manufacturing processes … Finally, semiconductor devices can be utilized in multiple products …

… production processes. This paper provides an overview of semiconductor manufacturing
processes … Each step of device fabrication is detailed with its attendant chemical and physical …

… Semiconductor devices are manufactured or fabricated on round disks of crystalline silicon
(wafers) in a process … and contain hundreds of individual semiconductor devices or die. Most …

… This invention relates to methods of manu10 factoring semiconductor devices and further …
semiconductor devices manufactured by such methods. In the manufacture of a semiconductor …

… can be applied to semiconductor device manufacture in various ways and its application is
… in the manufacture of planar semicondustor devices, including transistors and semiconductor …