Sharp bends and Mach-Zehnder interferometer based on Ge-rich-SiGe waveguides on SiGe graded buffer
Optics express, 2015•opg.optica.org
The integration of germanium (Ge)-rich active devices in photonic integrated circuits is
challenging due to the lattice mismatch between silicon (Si) and Ge. A new Ge-rich silicon-
germanium (SiGe) waveguide on graded buffer was investigated as a platform for integrated
photonic circuits. At a wavelength of 1550 nm, low loss bends with radii as low as 12 µm and
Multimode Interferometer beam splitter based on Ge-rich SiGe waveguide on graded buffer
were designed, fabricated and characterized. A Mach Zehnder interferometer exhibiting a …
challenging due to the lattice mismatch between silicon (Si) and Ge. A new Ge-rich silicon-
germanium (SiGe) waveguide on graded buffer was investigated as a platform for integrated
photonic circuits. At a wavelength of 1550 nm, low loss bends with radii as low as 12 µm and
Multimode Interferometer beam splitter based on Ge-rich SiGe waveguide on graded buffer
were designed, fabricated and characterized. A Mach Zehnder interferometer exhibiting a …
The integration of germanium (Ge)-rich active devices in photonic integrated circuits is challenging due to the lattice mismatch between silicon (Si) and Ge. A new Ge-rich silicon-germanium (SiGe) waveguide on graded buffer was investigated as a platform for integrated photonic circuits. At a wavelength of 1550 nm, low loss bends with radii as low as 12 µm and Multimode Interferometer beam splitter based on Ge-rich SiGe waveguide on graded buffer were designed, fabricated and characterized. A Mach Zehnder interferometer exhibiting a contrast of more than 10 dB has been demonstrated.
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