[HTML][HTML] TiO2 membrane high-contrast grating reflectors for vertical-cavity light-emitters in the visible wavelength regime
E Hashemi, J Bengtsson, JS Gustavsson… - Journal of Vacuum …, 2015 - pubs.aip.org
In this work, the authors describe a novel route to achieve a high reflectivity, wide bandwidth
feedback mirror for GaN-based vertical-cavity light emitters; using air-suspended high
contrast gratings in TiO 2, with SiO 2 as a sacrificial layer. The TiO 2 film deposition and the
etching processes are developed to yield grating bars without bending, and with near-ideal
rectangular cross-sections. Measured optical reflectivity spectra of the fabricated high
contrast gratings show very good agreement with simulations, with a high reflectivity of> …
feedback mirror for GaN-based vertical-cavity light emitters; using air-suspended high
contrast gratings in TiO 2, with SiO 2 as a sacrificial layer. The TiO 2 film deposition and the
etching processes are developed to yield grating bars without bending, and with near-ideal
rectangular cross-sections. Measured optical reflectivity spectra of the fabricated high
contrast gratings show very good agreement with simulations, with a high reflectivity of> …
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