cmut technology applied to galvanic isolation: Theory and experiments
2015 IEEE International Ultrasonics Symposium (IUS), 2015•ieeexplore.ieee.org
This study relies on double-sided chips where capacitive Micromachined Ultrasonic
Transducers (cMUT) are manufactured on both sides of a silicon substrate in order to
perform galvanic isolation between two electrical circuits. The operating principle is based
on the propagation of acoustic waves from one transducer to the other, providing a high
level of electrical isolation. The work presented here focuses mainly on the assessment of
the power efficiency, from an experimental and from a theoretical point of view. Encouraging …
Transducers (cMUT) are manufactured on both sides of a silicon substrate in order to
perform galvanic isolation between two electrical circuits. The operating principle is based
on the propagation of acoustic waves from one transducer to the other, providing a high
level of electrical isolation. The work presented here focuses mainly on the assessment of
the power efficiency, from an experimental and from a theoretical point of view. Encouraging …
This study relies on double-sided chips where capacitive Micromachined Ultrasonic Transducers (cMUT) are manufactured on both sides of a silicon substrate in order to perform galvanic isolation between two electrical circuits. The operating principle is based on the propagation of acoustic waves from one transducer to the other, providing a high level of electrical isolation. The work presented here focuses mainly on the assessment of the power efficiency, from an experimental and from a theoretical point of view. Encouraging power efficiency values were reached, showing a significant efficiency gain when taking advantage of the coupling with the substrate.
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