… in Si:H films grown with different hydrogen to silane dilution ratios have been investigated.
In this paper we present results of structural characterization of hydrogen diluted silicon films …

… silicon (Si:H) thin films deposited from silane diluted with hydrogen, which is based on the
TEM measurements and the analysis of IR vibrational spectra of Si:H thin films. … to the dilution-…

… microstructural changes in the film produced. We find that the density and silane fragment
concentration as well as overall film growth rate remain constant through … The stress in the film, …

… for which all the layers were deposited under argon dilution including the p and n layers. A
… We conclude that argon dilution of silane can be an alternative to the hydrogen dilution to …

… :H films deposited with strongly diluted SiH4 has been studied concerning the effect of the
accumulated film … In conclusion, the effect of film thickness on the interconnected void network, …

… amorphous silicon films prepared near the onset of microcrystallinity using a mixture of silane,
… The deposition rate of the films is in the range of 4–5 Å/s for moderate argon dilution and …

… the dilution gases in a mercury-sensitized photo-CVD. This paper describes the effect of
hydrogen dilution of silane in a-Si:H films, … the helium dilution of silane. A comparison between …

… silicon films prepared from hydrogen-diluted silane using plasma-enhanced chemical vapor
deposition. Hydrogen dilution of silane … hydrogen dilution ratios the growth of films becomes …

… in silicon layers prepared by plasma-enhanced chemical-vapor deposition using silane
dilution … The large range of silane dilution investigated can be divided into an amorphous and a …

… silicon films without direct exposure to hydrogen and using helium dilution to a … Hence,
it is asserted that nanocrystalline silicon films are produced from helium dilution in the silane …