Porosity engineering in glancing angle deposition thin films

MO Jensen, MJ Brett - Applied Physics A, 2005 - Springer
porosity, using a variation of the glancing angle deposition … highly porous film microstructures
obtained for certain deposition … effects inherent in obliquely deposited thin films. The …

Quantification of porosity and deposition rate of nanoporous films grown by oblique-angle deposition

DJ Poxson, FW Mont, MF Schubert, JK Kim… - Applied Physics …, 2008 - pubs.aip.org
porosity and deposition rate of a material to its vapor flux incidence angle for oblique-angle
deposition. … Porosity and deposition rates directly relate to the refractive index and thickness, …

[图书][B] Glancing angle deposition of thin films: engineering the nanoscale

MM Hawkeye, MT Taschuk, MJ Brett - 2014 - books.google.com
… the α angle during deposition introduces controlled porosity gradients to thefilm. Pre-and
post-deposition processes canalso be used to further controlfilmstructure: (e)depositing onto pre…

Advanced techniques for glancing angle deposition

K Robbie, JC Sit, MJ Brett - Journal of Vacuum Science & Technology …, 1998 - pubs.aip.org
… flux must be deposited at a large oblique angle resulting in a very porous film. Conversely…
angle deposition (GLAD)1 employs oblique angle deposition and substrate motion to engineer

Development of two-level porosity during glancing angle deposition

CM Zhou, D Gall - Journal of Applied Physics, 2008 - pubs.aip.org
… exponent of ∼ − 1 for glancing angle deposition on flat substrates. This suggests that the Al
nanorods of our two-level porous layers exhibit comparable growth competition as observed …

Influence of Oblique Angle Deposition on Porous Polymer Film Formation

S Bacheller, NA Welchert, M Gupta - Langmuir, 2023 - ACS Publications
angle deposition to a modified initiated chemical vapor deposition (iCVD) process to synthesize
porous … excess monomer is sublimated, resulting in a porous polymer film. We found that …

… study of effects of main process parameters on porosity, track geometry, deposition rate, and powder efficiency for high deposition rate laser metal deposition

C Zhong, T Biermann, A Gasser… - Journal of Laser …, 2015 - pubs.aip.org
… The mean value of these four cross-sectional porosities is defined as track porosity r T P
⁠. The defining equations for cross-sectional porosity and track porosity are shown below …

Porous broadband antireflection coating by glancing angle deposition

SR Kennedy, MJ Brett - Applied optics, 2003 - opg.optica.org
… as glancing angle deposition (GLAD), a unique thin-film deposition … substrate motion during
deposition to create tailored … It is well known that thin films deposited at oblique angles of …

Growth assisted by glancing angle deposition: a new technique to fabricate highly porous anisotropic thin films

JR Sanchez-Valencia, R Longtin… - … applied materials & …, 2016 - ACS Publications
… We report a new methodology based on glancing angle deposition (GLAD) of an organic
molecule in … Glancing angle deposition (GLAD) is a very well established technique to engineer

Photocatalytic properties of porous titania grown by oblique angle deposition

MJ Riley, B Williams, GY Condon, J Borja… - Journal of Applied …, 2012 - pubs.aip.org
… Thus, as the film is made more porous, there is less surface area available for reaction, even
… at a given porosity and similar to the findings of an optimum deposition angle by Pyun et al. …