Methods of deposition of hydrogenated amorphous silicon for device applications
WG Van Sark - Handbook of Thin Films, 2002 - Elsevier
Publisher Summary This chapter describes the deposition of hydrogenated amorphous
silicon (a-Si: H) and related materials by employing a low-temperature, low-density plasma …
silicon (a-Si: H) and related materials by employing a low-temperature, low-density plasma …
Optoelectronic properties of hydrogenated amorphous silicon films grown using a modified pulsed plasma discharge
C Mukherjee, C Anandan, T Seth, PN Dixit… - Applied physics …, 1996 - pubs.aip.org
Hydrogenated amorphous silicon (a-Si: H) films were deposited by a modified pulsed
plasma decomposition of silane and disilane in which a nonzero low power level was …
plasma decomposition of silane and disilane in which a nonzero low power level was …
The preparation of in situ doped hydrogenated amorphous silicon by homogeneous chemical vapor deposition
BS Meyerson, BA Scott, DJ Wolford - Journal of Applied Physics, 1983 - pubs.aip.org
Raman scattering, infrared absorption, conductivity measurements, electron microprobe,
and secondary ion mass spectrometry (SIMS) were used to characterize boron and …
and secondary ion mass spectrometry (SIMS) were used to characterize boron and …
Hydrogen plasma enhanced crystallization of hydrogenated amorphous silicon films
Polycrystalline silicon polysilicon is used extensively in the fabrication of thin film transistors
TFTs. Polysilicon formed by the crystallization of amorphous silicon (a-Si) has far superior …
TFTs. Polysilicon formed by the crystallization of amorphous silicon (a-Si) has far superior …
Plasma deposition of hydrogenated amorphous silicon films
W Luft, S Tsuo - Appl. Phys. Commun.;(United States), 1988 - osti.gov
Plasma-assisted chemical vapor deposition has become the most common technique used
in the deposition of hydrogenated amorphous silicone films and devices for photovoltaic …
in the deposition of hydrogenated amorphous silicone films and devices for photovoltaic …
[引用][C] Hydrogenated amorphous silicon films deposited by reactive sputtering: The electronic properties, hydrogen bonding and microstructure
M Pinarbasi, N Maley, A Myers, JR Abelson - Thin Solid Films, 1989 - Elsevier
M. PINARBASI, N. MALEY, A. MYERS AND JR ABELSON PROLOGUE Objective: • Kinetics of
Film Growth • Influel~ce or Growth on F Page 1 Thin SolidFilms, 171 (1989) 217 233 217 …
Film Growth • Influel~ce or Growth on F Page 1 Thin SolidFilms, 171 (1989) 217 233 217 …
Device‐quality wide‐gap hydrogenated amorphous silicon films deposited by plasma chemical vapor deposition at low substrate temperatures.
Y Hishikawa, S Tsuge, N Nakamura, S Tsuda… - Journal of applied …, 1991 - pubs.aip.org
Hydrogenated amorphous silicon (a‐Si: H) films have been fabricated by a plasma chemical
vapor deposition (plasma‐CVD) method at low substrate temperatures (T s: 80 or 50° C) to …
vapor deposition (plasma‐CVD) method at low substrate temperatures (T s: 80 or 50° C) to …
Principles for controlling the optical and electrical properties of hydrogenated amorphous silicon deposited from a silane plasma
Y Hishikawa, S Tsuda, K Wakisaka… - Journal of applied …, 1993 - pubs.aip.org
The optical, electrical, and structural properties of hydrogenated amorphous silicon (a‐Si: H)
films are systematically investigated as functions of the substrate temperature (T s) and …
films are systematically investigated as functions of the substrate temperature (T s) and …
Alternative deposition processes for hydrogenated amorphous silicon and related alloys
YS Tsuo, W Luft - Applied Physics Communications;(USA), 1990 - osti.gov
Plasma-assisted chemical vapor deposition (CVD), also known as glow discharge
deposition, has become the most common technique used in the deposition of …
deposition, has become the most common technique used in the deposition of …
Homogeneous chemical vapor deposition
BA Scott - Semiconductors and Semimetals, 1984 - Elsevier
Publisher Summary This chapter review the homogeneous chemical vapor deposition
(HOMOCVD) method and its use to study the chemistry of amorphous hydrogenated silicon …
(HOMOCVD) method and its use to study the chemistry of amorphous hydrogenated silicon …