Image quality enhancement of a CD-SEM image using conditional generative adversarial networks

Y Midoh, K Nakamae - Metrology, Inspection, and Process …, 2019 - spiedigitallibrary.org
Critical dimension scanning electron microscopes (CD-SEMs) are widely used as the tool for
measuring the actual size, shape, and roughness of device patterns in the semiconductor …

Wafer SEM image generation with conditional generative adversarial network

H Du, Z Shi - Journal of Physics: Conference Series, 2020 - iopscience.iop.org
Abstract Scanning Electron Microscope (SEM) images play an essential role in the analysis
and evaluation of the defects of the circuit in advanced integrated circuit manufacturing …

Enforcing perceptual consistency on generative adversarial networks by using the normalised laplacian pyramid distance

A Hepburn, V Laparra, R McConville… - arXiv preprint arXiv …, 2019 - arxiv.org
In recent years there has been a growing interest in image generation through deep
learning. While an important part of the evaluation of the generated images usually involves …

Conditional image synthesis with auxiliary classifier gans

A Odena, C Olah, J Shlens - International conference on …, 2017 - proceedings.mlr.press
In this paper we introduce new methods for the improved training of generative adversarial
networks (GANs) for image synthesis. We construct a variant of GANs employing label …

Learning by competing: Competitive multi-generator based adversarial learning

I Kajo, M Kas, A Chahi, Y Ruichek - Applied Soft Computing, 2023 - Elsevier
Generative adversarial networks (GANs) have been extensively used for dozens of image
enhancement and image translation applications, where several traditional and novel …

Defect simulation in SEM images using generative adversarial networks

Z Wang, L Yu, L Pu - Metrology, Inspection, and Process …, 2021 - spiedigitallibrary.org
SEM image processing is an important part of semiconductor manufacturing. However, one
difficulty of SEM image processing is collecting enough defect-containing samples of defect …

SEM image quality enhancement: an unsupervised deep learning approach

L Yu, W Zhou, L Pu, W Fang - Metrology, Inspection, and …, 2020 - spiedigitallibrary.org
Continuous reduction in pattern size, the primary path of advancement for the semiconductor
industry, has greatly increased resolution and throughput demands for defect inspection and …

HRGAN: A generative adversarial network producing higher-resolution images than training sets

M Park, M Lee, S Yu - Sensors, 2022 - mdpi.com
The generative adversarial network (GAN) has demonstrated superb performance in
generating synthetic images in recent studies. However, in the conventional framework of …

Learning-aware feature denoising discriminator

Y Gan, T Xiang, H Liu, M Ye - Information Fusion, 2023 - Elsevier
Although generative adversarial networks (GANs) show great prospects for the task of image
synthesis, the quality of synthesized images by existing GANs is sometimes inferior to real …

[HTML][HTML] The effect of loss function on conditional generative adversarial networks

A Abu-Srhan, MAM Abushariah, OS Al-Kadi - Journal of King Saud …, 2022 - Elsevier
Abstract Conditional Generative Adversarial Network (cGAN) is a general purpose approach
for many image-to-image translation tasks, which aims to translate images from one form to …