Optoelectronic properties of polycrystalline silicon produced by low-temperature (600° C) solid-phase crystallization of hydrogenated amorphous silicon
TE Dyer, JM Marshall, JF Davies - Philosophical Magazine B, 1994 - Taylor & Francis
We present novel data on optoelectronic properties observed in the amorphous-to-
polycrystalline silicon (polysilicon) phase transition, and the effect on as-crystallized films of …
polycrystalline silicon (polysilicon) phase transition, and the effect on as-crystallized films of …
Performance of thin hydrogenated amorphous silicon thin‐film transistors
In this paper we have analyzed the influence of the mask channel length (LM) on the
performance of the 55‐nm‐hydrogenated amorphous silicon (a‐Si: H) thin‐film transistors …
performance of the 55‐nm‐hydrogenated amorphous silicon (a‐Si: H) thin‐film transistors …
The annealing temperature effect on the electrical properties of boron‐doped hydrogenated amorphous silicon a‐Si: H (B)
The effects of the boron incorporation on the physico‐chemical, optical and electric
properties of hydrogenated amorphous silicon (a‐Si: H) films are presented. Boron‐doped …
properties of hydrogenated amorphous silicon (a‐Si: H) films are presented. Boron‐doped …
Doping effects of aluminium on the properties of hydrogenated amorphous silicon–carbon alloy films prepared by magnetron sputtering
N Saito, Y Tomioka, H Senda, T Yamaguchi… - Philosophical …, 1990 - Taylor & Francis
Aluminium has been introduced into hydrogenated amorphous silicon-carbon alloy films
prepared by reactive magnetron sputtering, using composite targets of silicon and …
prepared by reactive magnetron sputtering, using composite targets of silicon and …
[PDF][PDF] Heterojunctions of hydrogenated amorphous silicon and monocrystalline silicon
W Fuhs, L Korte, M Schmidt - Journal of Optoelectronics and …, 2006 - old.joam.inoe.ro
The investigation of heterojunctions between amorphous and crystalline semiconductors
dates back to the early days of research in the field of amorphous semiconductors. In fact …
dates back to the early days of research in the field of amorphous semiconductors. In fact …
Doping effects on post-hydrogenated chemical-vapour-deposited amorphous silicon
J Magario, D Kaplan, A Friederich… - Philosophical …, 1982 - Taylor & Francis
Conductivity and EPR experiments are reported for boron-and phosphorus-doped chemical-
vapour-deposited amorphous silicon film. In as-deposited films a large increase in the …
vapour-deposited amorphous silicon film. In as-deposited films a large increase in the …
Effect of hydrogen dilution on the optical properties of hydrogenated amorphous silicon prepared by plasma deposition
M Yamaguchi, K Morigaki - Philosophical Magazine B, 1999 - Taylor & Francis
A series of experimental studies has been made on the effect of the dilution of silane with
hydrogen on optical properties of hydrogenated amorphous silicon films (a-Si: H) prepared …
hydrogen on optical properties of hydrogenated amorphous silicon films (a-Si: H) prepared …
Amorphous silicon hydrogen alloys produced under magnetic field
M Taniguchi, M Hirose, Y Osaka - Journal of Non-Crystalline Solids, 1980 - Elsevier
Amorphous silicon films have been prepared by plasma decomposition of silane under
magnetic field. The films produced at a high power and a relatively high magnetic field …
magnetic field. The films produced at a high power and a relatively high magnetic field …
Alternative deposition processes for hydrogenated amorphous silicon and related alloys
YS Tsuo, W Luft - Applied Physics Communications;(USA), 1990 - osti.gov
Plasma-assisted chemical vapor deposition (CVD), also known as glow discharge
deposition, has become the most common technique used in the deposition of …
deposition, has become the most common technique used in the deposition of …
[引用][C] Defects in hydrogenated amorphous silicon
K Winer - Annual Review of Materials Science, 1991 - annualreviews.org
Amorphous semiconductors have a long history of successful technological exploitation (1).
However, the large defect density characteristic of amorphous silicon (a-Si), the prototypical …
However, the large defect density characteristic of amorphous silicon (a-Si), the prototypical …