Optoelectronic properties of polycrystalline silicon produced by low-temperature (600° C) solid-phase crystallization of hydrogenated amorphous silicon

TE Dyer, JM Marshall, JF Davies - Philosophical Magazine B, 1994 - Taylor & Francis
We present novel data on optoelectronic properties observed in the amorphous-to-
polycrystalline silicon (polysilicon) phase transition, and the effect on as-crystallized films of …

Performance of thin hydrogenated amorphous silicon thin‐film transistors

J Kanicki, FR Libsch, J Griffith, R Polastre - Journal of Applied Physics, 1991 - pubs.aip.org
In this paper we have analyzed the influence of the mask channel length (LM) on the
performance of the 55‐nm‐hydrogenated amorphous silicon (a‐Si: H) thin‐film transistors …

The annealing temperature effect on the electrical properties of boron‐doped hydrogenated amorphous silicon a‐Si: H (B)

N Khelifati, S Tata, A Rahal, R Cherfi… - … status solidi c, 2010 - Wiley Online Library
The effects of the boron incorporation on the physico‐chemical, optical and electric
properties of hydrogenated amorphous silicon (a‐Si: H) films are presented. Boron‐doped …

Doping effects of aluminium on the properties of hydrogenated amorphous silicon–carbon alloy films prepared by magnetron sputtering

N Saito, Y Tomioka, H Senda, T Yamaguchi… - Philosophical …, 1990 - Taylor & Francis
Aluminium has been introduced into hydrogenated amorphous silicon-carbon alloy films
prepared by reactive magnetron sputtering, using composite targets of silicon and …

[PDF][PDF] Heterojunctions of hydrogenated amorphous silicon and monocrystalline silicon

W Fuhs, L Korte, M Schmidt - Journal of Optoelectronics and …, 2006 - old.joam.inoe.ro
The investigation of heterojunctions between amorphous and crystalline semiconductors
dates back to the early days of research in the field of amorphous semiconductors. In fact …

Doping effects on post-hydrogenated chemical-vapour-deposited amorphous silicon

J Magario, D Kaplan, A Friederich… - Philosophical …, 1982 - Taylor & Francis
Conductivity and EPR experiments are reported for boron-and phosphorus-doped chemical-
vapour-deposited amorphous silicon film. In as-deposited films a large increase in the …

Effect of hydrogen dilution on the optical properties of hydrogenated amorphous silicon prepared by plasma deposition

M Yamaguchi, K Morigaki - Philosophical Magazine B, 1999 - Taylor & Francis
A series of experimental studies has been made on the effect of the dilution of silane with
hydrogen on optical properties of hydrogenated amorphous silicon films (a-Si: H) prepared …

Amorphous silicon hydrogen alloys produced under magnetic field

M Taniguchi, M Hirose, Y Osaka - Journal of Non-Crystalline Solids, 1980 - Elsevier
Amorphous silicon films have been prepared by plasma decomposition of silane under
magnetic field. The films produced at a high power and a relatively high magnetic field …

Alternative deposition processes for hydrogenated amorphous silicon and related alloys

YS Tsuo, W Luft - Applied Physics Communications;(USA), 1990 - osti.gov
Plasma-assisted chemical vapor deposition (CVD), also known as glow discharge
deposition, has become the most common technique used in the deposition of …

[引用][C] Defects in hydrogenated amorphous silicon

K Winer - Annual Review of Materials Science, 1991 - annualreviews.org
Amorphous semiconductors have a long history of successful technological exploitation (1).
However, the large defect density characteristic of amorphous silicon (a-Si), the prototypical …