An evaporation process has been developed for depositing highly porous insulator or metal
films with densities as low as 15% of bulk. The process utilizes either multiple evaporation …

Recent experimental work by a number of researchers has demonstrated that unusual high
porosity thin films may be obtained in physical deposition systems by combining glancing …

The production of highly porous films by oblique deposition has attracted recent attention
because of the possible applications of such films. The morphology of obliquely evaporated …

We describe a simple method for the fabrication of highly ordered porous structures. That is,
utilizing capillary forces, ultrafine particles are directly used to assemble themselves in the …

We have demonstrated the integration of various morphologies generated by dynamic
oblique deposition, during which the deposition angle and the azimuth of the substrate are …

When a thin film is deposited by physical vapor deposition, with the vapor flux arriving at an
oblique angle from the substrate normal, and under conditions of sufficiently limited adatom …

An electron microscope was used to study the origin of microscopic voids (pores) in
crystalline and non-crystalline films prepared by evaporation, sputtering and …

We present a new technique for the fabrication of thin films at highly oblique flux incidence
angles, in which the direction of film growth and the direction of incoming deposition flux are …

A highly ordered arrangement of pores with multiple sizes in film and particle forms was
successfully prepared using the dip-coating and spray-drying methods, respectively. The …

Films with three-dimensionally ordered macroporous structures have recently been studied
extensively because of their wide applications in separations, catalysis, optical information …