X-ray reflectometry characterization of porous silicon films prepared by a glancing-angle deposition method
The competitive growth process of ballistic deposition is studied experimentally using x-ray
reflectivity characterization of silicon thin films deposited with various vapor incidence …
reflectivity characterization of silicon thin films deposited with various vapor incidence …
Characterization of porous silicon layers by grazing-incidence x-ray fluorescence and diffraction
A Bensaid, G Patrat, M Brunel, F De Bergevin… - Solid state …, 1991 - Elsevier
X-ray fluorescence and diffraction has been performed on porous silicon samples at
incidences near the critical angle for total external reflection. By fitting the X-ray fluorescence …
incidences near the critical angle for total external reflection. By fitting the X-ray fluorescence …
Porous silicon characterization by x-ray reflectivity: problems arising from using a vacuum environment with synchrotron beam
S Sama, C Ferrero, S Lequien, S Milita… - Journal of Physics D …, 2001 - iopscience.iop.org
Thin (300 nm) porous silicon layers have been formed on p-doped silicon substrate to be
characterized by x-ray reflectivity. The objective was to determine the layer thickness, the …
characterized by x-ray reflectivity. The objective was to determine the layer thickness, the …
X-ray scattering study of porous silicon layers
V Chamard, G Dolino, J Stettner - Physica B: Condensed Matter, 2000 - Elsevier
X-ray reflectivity is used to study the mesoscopic structure of porous silicon layers. For a
porous silicon thin film, we present measurements of the specular and the diffuse scattering …
porous silicon thin film, we present measurements of the specular and the diffuse scattering …
Determination by x-ray reflectivity and small angle x-ray scattering of the porous properties of mesoporous silica thin films
S Dourdain, JF Bardeau, M Colas, B Smarsly… - Applied Physics …, 2005 - pubs.aip.org
Two-dimensional hexagonal silica thin films templated by a triblock copolymer were
investigated by grazing incident small angle x-ray scattering (GISAXS) and x-ray reflectivity …
investigated by grazing incident small angle x-ray scattering (GISAXS) and x-ray reflectivity …
Analysis of mesoporous thin films by X-ray reflectivity, optical reflectivity and grazing incidence small angle X-ray scattering
It is well-established that X-ray reflectivity (XR) is an invaluable tool to investigate the
structure of thin films. Indeed, this technique provides under correct analysis, the electron …
structure of thin films. Indeed, this technique provides under correct analysis, the electron …
Properties of nanoporous silica thin films determined by high-resolution x-ray reflectivity and small-angle neutron scattering
A new methodology based on a novel combination of a high-resolution specular x-ray
reflectivity and small-angle neutron scattering has been developed to evaluate the structural …
reflectivity and small-angle neutron scattering has been developed to evaluate the structural …
Evidence of pore correlation in porous silicon: an x-ray grazing-incidence study
V Chamard, P Bastie, D Le Bolloch, G Dolino, E Elkaïm… - Physical Review B, 2001 - APS
The structure of porous silicon is investigated by grazing incidence x-ray scattering. Using
GISAXS (grazing incidence small-angle x-ray scattering), a systematic pore correlation is …
GISAXS (grazing incidence small-angle x-ray scattering), a systematic pore correlation is …
X‐ray small‐angle scattering analysis of porous silicon layers
P Goudeau, A Naudon, G Bomchil… - Journal of applied …, 1989 - pubs.aip.org
A small‐angle x‐ray scattering study of porous layers prepared on lightly doped and heavily
doped silicon wafers reveals strong differences according to the dopant type. The p‐type …
doped silicon wafers reveals strong differences according to the dopant type. The p‐type …
X-ray reflectivity investigation of thin p-type porous silicon layers
X-ray reflectivity (XRR) was used to investigate the p−-and p+-type porous silicon (PS)
layers. For p−-type samples, a linear dependence of the thickness versus the anodization …
layers. For p−-type samples, a linear dependence of the thickness versus the anodization …