The fabrication of a bolometer for infrared detection using a boron doped amorphous silicon
(a-Si-B: H) thin film is presented for the first time. This thin film (170 nm) was deposited on a …

We present the characterization of a boron doped hydrogenated amorphous silicon (a-Si: H)
thermosensor bolometer array for far infrared detection. The array was fabricated over a …

Arrays of micro-bolometer are very promising as infrared detectors, since they do not require
cryogenic cooling, thus allowing an effective cost reduction. The heart of a micro-bolometer …

An important application of thin-film hydrogenated amorphous silicon (α-Si: H) is infrared
detection and imaging with microbolometer focal plane arrays. Key α-Si: H electrical …

Large area thin film position sensitive detectors based on amorphous silicon technology
have been prepared on polyimide substrates using the conventional plasma enhanced …

Thin-film detectors made of hydrogenated amorphous silicon (a-Si: H) and amorphous
silicon carbide (a-SiC: H) with adjustable sensitivity in the ultraviolet (UV) spectrum were …

We present a study of the thermal characteristics of an infrared detector (un‐cooled micro‐
bolometer), based on an amorphous silicon germanium film (a‐SixGey: H), deposited by …

Boron doped hydrogenated silicon films used as thermo-sensing layers in infrared detectors
or uncooled micro-bolometers are prepared by radio-frequency plasma-enhanced chemical …

Boron-doped hydrogenated silicon films are used in thermo-sensing layer in infrared
detectors or uncooled microbolometers. Among thermo-sensing materials such as vanadium …

In this work, we report the fabrication and characterization of bolometers based on
amorphous silicon germanium alloys (a-Si1− xGex: H, F). The fabrication of microbolometers …