Amorphous-silicon-based uncooled microbolometer IRFPA

C Vedel, JL Martin, JL Ouvrier-Buffet… - Infrared Technology …, 1999 - spiedigitallibrary.org
LETI LIR has been involved in Amorphous Silicon uncooled microbolometer development
for a few years. This paper reports recent progress that have been carried out both in …

Monolithic silicon bolometers

PM Downey, AD Jeffries, SS Meyer, R Weiss… - Applied …, 1984 - opg.optica.org
A new type of bolometer detector for the millimeter and submillimeter spectral range is
described. The bolometer is constructed of silicon using integrated circuit fabrication …

320x240 microblometer uncooled IRFPA

E Mottin, JL Martin, JL Ouvrier-Buffet… - … Detectors and Focal …, 2000 - spiedigitallibrary.org
LETI LIR has been involved in Amorphous Silicon uncooled microbolometer development
for a few years. This silicon IR detection is now well mastered and matured so that industrial …

Amorphous silicon microbolometer technology

AJ Syllaios, TR Schimert, RW Gooch… - MRS Online …, 1999 - Springer
Highly sensitive hydrogenated amorphous silicon (a-Si: H) microbolometer arrays have
been developed that take advantage of the high temperature coefficient of resistance (TCR) …

An amorphous silicon/silicon carbide thin-film thermo-optical interferometer at λ= 1.5 µm with 3 MHz bandwidth capability

G Cocorullo, FG Della Corte, I Rendina… - Integrated Photonics …, 1996 - opg.optica.org
The optoelectronic properties of hydrogenated amorphous silicon (α-Si: H) has been always
considered almost exclusively for the fabrication of wide-area low-cost photovoltaic panels …

[引用][C] Optical properties of the integrated infrared sensor

D Rossberg - Proceedings of the International Solid-State …, 1995 - ieeexplore.ieee.org
Common devices for infrared spectroscopy tend to be large and expensive, having a high
resolution power. For many applications such high efficiency is not necessary. Therefore, a …

Polycrystalline silicon-based sensors

E Lüder - Sensors and Actuators, 1986 - Elsevier
This paper describes the processes now most often used to deposit polycrystalline,
microcrystalline or amorphous Si films, and their applications for sensors. The processes are …

High-speed amorphous silicon germanium infrared sensors prepared on crystalline silicon substrates

JJ Ho, YK Fang, KH Wu, WT Hsieh… - … on Electron Devices, 1998 - ieeexplore.ieee.org
Different structures of high-speed infrared sensors based on amorphous silicon germanium
and amorphous silicon heterostructures have been successfully developed on crystalline …

A new silicon-on-glass process for integrated sensors

LJ Spangler, KD Wise - IEEE Technical Digest on Solid-State …, 1988 - ieeexplore.ieee.org
A process is reported for the formation of high-performance thin single-crystal silicon films on
glass substrates. The process utilizes the electrostatic bonding of a silicon wafer to glass …

Amorphous silicon photodetector for optical interconnections

R Gaede, F Li, D Hyde, D Shen - Journal of Non-Crystalline Solids, 2000 - Elsevier
This paper discusses the feasibility of using hydrogenated amorphous silicon
photodetectors in optical interconnections. Our analysis of the transient carrier transport in …