A 128 by 128 pixel bolometer infrared focal plane array using thin film titanium has been
developed. The device is a monolithically integrated structure with a titanium bolometer …

The present paper describes the properties of a photochemical sensor based on amorphous
silicon MIS (Metal-Insulator-Semiconductor) diodes. The structure of the sensors used in this …

This paper describes the growth and properties of micro-machined semiconductor
microbolometers. These thermally isolated structures are employed in uncooled infrared …

Silicon integrated circuits (IC) in conjunction with the micro-machining technology for thin
films, have opened new ways for the development of low cost and reliable night vision …

1. Background The emergence of uncooled detectors has opened new opportunities for IR
detection for both military and civil applications. Standard infrared applications are involved …

LETI LIR has been involved in amorphous silicon uncooled microbolometer development for
a few years. This silicon IR detection is now well mastered and matured so that industrial …

Detectors used in the infrared normally rely on either cryogenic photodetection or on effects
resulting from an increase in temperature. The latter are limited by thermal relaxation and …

A new structure uncooled amorphous silicon (a-Si) microbolometer for infrared (IR) detection
has been fabricated and characterized. New type of thermal isolation and IR absorption …

This paper presents the key design features of an uncooled infrared image sensor with 160
by 120 pixels. This sensor has a monolithic structure using micromachining technology …

The emergence of uncooled infrared detectors has opened new opportunities for IR imaging
both for military and civil applications. Infrared imaging sensors that operate without …