When a thin film is deposited by physical vapor deposition, with the vapor flux arriving at an
oblique angle from the substrate normal, and under conditions of sufficiently limited adatom …

Physical vapor deposition under conditions of obliquely incident flux and limited adatom
diffusion results in a film with a columnar microstructure. These columns will be oriented …

Sculptured thin films with three dimensional microstructure controlled on the 10 nm scale
were fabricated with an evaporation technique. Glancing angle deposition (GLAD) and …

An ultrahigh vacuum apparatus for the deposition of thin films with controlled three-
dimensional nanometer-scale structure is described. Our system allows an alternate, faster …

Publisher Summary This chapter focuses on experimental aspects of the Glancing angle
deposition (GLAD) technique–its methods and possibilities. It introduces the basic theory …

It has been shown that glancing angle deposition (GLAD) coupled with a prefabricated seed
layer can be used to fabricate periodic microstructures. In this article, we show that the …

Deposition of thin films onto a rotating substrate oriented obliquely with respect to the flux of
incoming vapor as depicted in Fig. 1a allows growth of a wide range of film structures. 1–12 …

Thin films with microstructures controlled on a nanometer scale have been fabricated using
a recently developed process called glancing angle deposition (GLAD) which combines …

An advanced deposition technique known as glancing angle deposition (GLAD)[K. Robbie,
JC Sit, and MJ Brett, J. Vac. Sci. Technol. B 16, 1115 (1998); K. Robbie and MJ Brett, US …

We have demonstrated the integration of various morphologies generated by dynamic
oblique deposition, during which the deposition angle and the azimuth of the substrate are …