The authors review selected topics in the development of hydrogenated amorphous silicon
(a‐Si: H), from its emergence some 50 years ago to its present status as a mature thin‐film …

From solar cell application point of view, this chapter reviews the aspects of hydrogenated
amorphous silicon (a-Si: H) based materials. Spear and LeComer made the first a-Si: H films …

This report summarizes the status of high-rate deposition technologies associated with
amorphous silicon thin films for photovoltaic applications. The report lists (1) deposition rates …

Hydrogenated amorphous silicon and related alloys represent a special type of thin film
semiconductor material that has attracted much attention in the last decade. The scientific …

The first amorphous silicon layers were reported in 1965 as films of 'silicon from
silane'deposited in a radio frequency glow discharge [1]. Ten years later, Walter Spear and …

This paper describes the current status of hydrogenated amorphous silicon (a-Si: H) based
solar cell technology and the evolution to its “coming of age”. Several features which are …

Hydrogenated amorphous silicon (a-Si: H) films have found increasing applications in the
last few years, in particular for thin film solar cells. Efficiencies of around 10% have been …

The extraordinary progress in research, development and now commercialization of the
amorphous silicon thin film technology is indeed a high technology Cinderella story. Barely …

Amorphous hydrogeneated silicon (a-Si: H) has already been accepted as a commercially
viable solar photovoltaic material. Technique to grow a-Si: H films at high rates need to be …

Publisher Summary This chapter describes the deposition of hydrogenated amorphous
silicon (a-Si: H) and related materials by employing a low-temperature, low-density plasma …