In a multi-cluster tool, there may be both single and dual-arm cluster tools. Such a multi-
cluster tool is called hybrid multi-cluster tool. To operate such a multi-cluster tool, one needs …

In operating a multi-cluster tool, it needs to coordinate the activities of multiple robots. Thus,
it is very challenging to schedule it. This paper conducts a study on one-wafer cyclic …

Due to the different behavior of single-arm and dual-arm cluster tools, it is challenging to
schedule a hybrid multi-cluster tool containing both of them. This paper aims to find an …

This paper studies the challenging problem of scheduling single-arm multi-cluster tools with
wafer residency time constraints. They have a linear topology and their bottleneck tool is …

Scheduling a multicluster tool with wafer residency time constraints is highly challenging yet
important in ensuring high productivity of wafer fabrication. This paper presents a method to …

Multi-cluster tools are widely adopted in wafer fabrication. It is of paramount importance to
schedule them to achieve their optimal throughput. This work intends to find their one-wafer …

Complex multi-cluster tools have been extensively used in semiconductor manufacturing. It
is crucial to increase their productivity by their effective operation. With structural complexity …

A multi-cluster tool is composed of a number of individual cluster tools linked by buffering
modules (BMs). The capacity of a BM can be one or two. Aiming at finding an optimal one …

It is a great challenge to find an optimal one-wafer cyclic schedule for a single-arm
multicluster tool that is widely adopted in semiconductor fabrication. Aiming to tackle this …

This work studies the scheduling problem of a single-arm multicluster tool with a linear
topology and process-bound bottleneck individual tool. The objective is to find a one-wafer …