Hydrogenated amorphous silicon (a-Si: H) films have found increasing applications in the
last few years, in particular for thin film solar cells. Efficiencies of around 10% have been …

From solar cell application point of view, this chapter reviews the aspects of hydrogenated
amorphous silicon (a-Si: H) based materials. Spear and LeComer made the first a-Si: H films …

Hydrogenated amorphous silicon (a‐Si: H) films were prepared by chemical vapor
deposition (CVD) from mixtures of silane, disilane, trisilane, and higher polysilanes in …

Hydrogenated amorphous silicon (a-Si: H) films were prepared by the process of mercury-
sensitized photochemical vapour deposition. Substrate temperature, hydrogen dilution and …

Hydrogenated amorphous silicon thin films have been prepared by thermal evaporation. IR
investigations showed the existence of all expected Si H. The electron spectroscopy for …

This report summarizes the status of high-rate deposition technologies associated with
amorphous silicon thin films for photovoltaic applications. The report lists (1) deposition rates …

High quality hydrogenated amorphous silicon (a-Si: H) films have been deposited using
thermal decomposition of silane (SiH 4) at a heated tungsten filament. Deposition rates up to …

Hydrogenated amorphous silicon films have been prepared by planar rf magnetron
sputtering method. The effect of deposition temperature and the hydrogen dilution on the …

Amorphous hydrogeneated silicon (a-Si: H) has already been accepted as a commercially
viable solar photovoltaic material. Technique to grow a-Si: H films at high rates need to be …

A double-chamber system was used to deposit large-area hydrogenated amorphous silicon
films for photovoltaic applications. The electro-optical characterisation of films of area 400 …