High quality Al2O3/(100) oxygen-terminated diamond interface for MOSFETs fabrication

TT Pham, M Gutiérrez, C Masante, N Rouger… - Applied Physics …, 2018 - pubs.aip.org
In this letter, we report on the improvement of gate controlled Al 2 O 3/(100) boron doped (B-
doped) oxygen-terminated diamond (O-diamond) Metal Oxide Semiconductor Capacitors …

Energy-band diagram configuration of Al2O3/oxygen-terminated p-diamond metal-oxide-semiconductor

A Maréchal, M Aoukar, C Vallée, C Rivière… - Applied Physics …, 2015 - pubs.aip.org
Diamond metal-oxide-semiconductor capacitors were prepared using atomic layer
deposition at 250 C of Al 2 O 3 on oxygen-terminated boron doped (001) diamond. Their …

High quality SiO2/diamond interface in O-terminated p-type diamond MOS capacitors

J Cañas, C Dussarrat, T Teramoto, C Masante… - Applied Physics …, 2022 - pubs.aip.org
Metal oxide semiconductor (MOS) capacitors were fabricated based on oxygen-terminated p-
type (100) oriented diamond and SiO 2 grown by atomic layer deposition. A detailed …

High temperature (300 C) ALD grown Al2O3 on hydrogen terminated diamond: Band offset and electrical properties of the MOSFETs

Z Ren, D Lv, J Xu, J Zhang, J Zhang, K Su… - Applied Physics …, 2020 - pubs.aip.org
Hydrogen-terminated diamond (H-diamond) metal-oxide-semiconductor field effect
transistors (MOSFETs) were fabricated on a polycrystalline diamond substrate. The device …

Comprehensive electrical analysis of metal/Al2O3/O-terminated diamond capacitance

TT Pham, A Maréchal, P Muret, D Eon… - Journal of Applied …, 2018 - pubs.aip.org
Metal oxide semiconductor capacitors were fabricated using p-type oxygen-terminated (001)
diamond and Al 2 O 3 deposited by atomic layer deposition at two different temperatures …

3326-V modulation-doped diamond MOSFETs

NC Saha, SW Kim, T Oishi… - IEEE Electron Device …, 2022 - ieeexplore.ieee.org
This letter reports the fabrication and characterization of 3.3-kV modulation-doped diamond
metal–oxide–semiconductor field-effect transistors (MOSFETs). The modulation doping was …

Electrical Properties of Boron-Doped Diamond MOSFETs With Ozone as Oxygen Precursor for Al2O3 Deposition

J Liu, T Teraji, B Da, Y Koide - IEEE Transactions on Electron …, 2023 - ieeexplore.ieee.org
Boron-doped diamond (B-diamond) MOS capacitors and MOSFETs are fabricated and
characterized. The Al2O3 gate insulator is deposited by an atomic layer deposition (ALD) …

Metal oxide semiconductor structure using oxygen-terminated diamond

G Chicot, A Maréchal, R Motte, P Muret… - Applied Physics …, 2013 - pubs.aip.org
Metal-oxide-semiconductor structures with aluminum oxide as insulator and p-type (100)
mono-crystalline diamond as semiconductor have been fabricated and investigated by …

Electrical Characterization of Metal/Al₂O₃/SiO₂/Oxidized-Si-Terminated (C–Si–O) Diamond Capacitors

Y Fu, S Kono, H Kawarada… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
Metal–oxide–semiconductor (MOS) capacitors with oxidized silicon-terminated (C–Si–O)
diamond as semiconductors and a stack of SiO 2 and Al 2 O 3 as gate insulators were …

[HTML][HTML] Transport mechanism in O-terminated diamond/ZrO2 based MOSCAPs

B Soto, J Cañas, MP Villar, D Araujo, J Pernot - Diamond and Related …, 2022 - Elsevier
Abstract Metal Oxide Semiconductor capacitors were fabricated using p-type O-terminated
(001) diamond and zirconium dioxide deposited by atomic layer deposition at low …