Flexible Control of Block Copolymer Directed Self‐Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole …
The semiconductor industry will qualify and ship 22 nm technology node, very large scale
integrated (VLSI) circuits in 2012, as announced by Intel.[1] It has brought increasingly …
integrated (VLSI) circuits in 2012, as announced by Intel.[1] It has brought increasingly …
Synthesis of Shape Amphiphiles Based on Functional Polyhedral Oligomeric Silsesquioxane End-Capped Poly(l-Lactide) with Diverse Head Surface Chemistry
This paper reports a facile, modular, and efficient approach to the synthesis of shape
amphiphiles with a hydrophobic polymer chain as the tail and a polar, compact, functional …
amphiphiles with a hydrophobic polymer chain as the tail and a polar, compact, functional …
Growth of silicon oxide in thin film block copolymer scaffolds
Thin films of asymmetric diblock copolymers have been used as scaffolds to define an
ordered array of nanometer‐scale reaction vessels in which high density arrays of silicon …
ordered array of nanometer‐scale reaction vessels in which high density arrays of silicon …
Inorganic gyroid with exceptionally low refractive index from block copolymer templating
Nanoporous polymers with gyroid nanochannels can be fabricated from the self-assembly of
degradable block copolymer, polystyrene-b-poly (l-lactide)(PS-PLLA), followed by the …
degradable block copolymer, polystyrene-b-poly (l-lactide)(PS-PLLA), followed by the …
Branched block copolymers for tuning of morphology and feature size in thin film nanolithography
A library of Y-shaped poly (dimethylsiloxane)(PDMS)-b-poly (d, l-lactide)(PLA) diblock
copolymers and their corresponding linear counterparts were synthesized, and their …
copolymers and their corresponding linear counterparts were synthesized, and their …
[引用][C] Crosslinked nanoparticle stripes and hexagonal networks obtained via selective patterning of block copolymer thin films
Thin films of a PS-b-PMMA diblock copolymer that self-organizes into PMMA cylinders in a
PS matrix were cast at a thickness that corresponds to the periodicity of the block copolymer …
PS matrix were cast at a thickness that corresponds to the periodicity of the block copolymer …
Sub‐10 nm Features Obtained from Directed Self‐Assembly of Semicrystalline Polycarbosilane‐Based Block Copolymer Thin Films
(Si+ Fe)-containing moieties in one block of the copolymer, a robust etch mask, enabling the
formation of high aspect ratio features, has been demonstrated to improve subsequent …
formation of high aspect ratio features, has been demonstrated to improve subsequent …
Silicon-containing block copolymers for lithographic applications
TY Lo, MR Krishnan, KY Lu, RM Ho - Progress in Polymer Science, 2018 - Elsevier
This comprehensive review, summarizes recent advances in the fabrication of well-ordered
block copolymer (BCP) thin films by different methods, focusing on the development of …
block copolymer (BCP) thin films by different methods, focusing on the development of …
Hydrogen bond assisted assembly of well-ordered polyhedral oligomeric silsesquioxane–block copolymer composites
Well-ordered block copolymer nanocomposites with d-spacings as small as 15 nm and
additive loadings greater than 70 mass% were formed upon blending functionalized …
additive loadings greater than 70 mass% were formed upon blending functionalized …
Macroscopic alignment of block copolymers on silicon substrates by laser annealing
AA Leniart, P Pula, A Sitkiewicz, PW Majewski - ACS nano, 2020 - ACS Publications
Laser annealing is a competitive alternative to conventional oven annealing of block
copolymer (BCP) thin films enabling rapid acceleration and precise spatial control of the self …
copolymer (BCP) thin films enabling rapid acceleration and precise spatial control of the self …