Scanning transmission electron microscopy for nanostructure characterization

SJ Pennycook, AR Lupini, M Varela… - Scanning microscopy for …, 2007 - Springer
The scanning transmission electron microscope (STEM) is an invaluable tool for the
characterization of nanostructures, providing a range of different imaging modes with the …

High-throughput sem via multi-beam sem: Applications in materials science

JR Michael, CY Nakakura, T Garbowski… - Microscopy and …, 2015 - cambridge.org
The maximum image acquisition rate for conventional SEM is limited by many factors related
to both the instrumentation used and the physics of secondary electron image formation. The …

Secondary-electron imaging of bulk crystalline specimens in an aberration corrected STEM

S Hwang, L Wu, K Kisslinger, J Yang, R Egerton, Y Zhu - Ultramicroscopy, 2024 - Elsevier
Atomic-scale electron microscopy traditionally probes thin specimens, with thickness below
100 nm, and its feasibility for bulk samples has not been documented. In this study, we …

Proposals for exact-point transmission-electron microscopy using focused ion beam specimen-preparation technique

T Ishitani, Y Taniguchi, S Isakozawa, H Koike… - Journal of Vacuum …, 1998 - pubs.aip.org
A focused ion beam (FIB) has been actively applied for preparation of about 0.1-μ m-thick
specimens for transmission electron microscopes (TEMs). For device failure analyses …

High‐resolution, high‐throughput imaging with a multibeam scanning electron microscope

AL Eberle, S Mikula, R Schalek, J Lichtman… - Journal of …, 2015 - Wiley Online Library
Electron–electron interactions and detector bandwidth limit the maximal imaging speed of
single‐beam scanning electron microscopes. We use multiple electron beams in a single …

Advances and applications of atomic-resolution scanning transmission electron microscopy

JJ Liu - Microscopy and Microanalysis, 2021 - cambridge.org
Although scanning transmission electron microscopy (STEM) images of individual heavy
atoms were reported 50 years ago, the applications of atomic-resolution STEM imaging …

Multi-beam SEM technology for high throughput imaging

K Crosby, AL Eberle, D Zeidler - MRS Advances, 2016 - cambridge.org
Recent developments in a number of fields call for high-throughput, high-resolution imaging
of large areas. Examples are reconstruction of macroscopic volumes of mouse brain tissue …

Analytical Spatial Resolution in EPMA: What is it and How can it be Estimated?

A Moy, J Fournelle - Microscopy and Microanalysis, 2017 - cambridge.org
The imaging benefits of field emission SEM are clear: edge resolution down to ten or so
nanometers, particularly for secondary electron images. Edge resolution is defined as the …

TSEM: A review of scanning electron microscopy in transmission mode and its applications

T Klein, E Buhr, CG Frase - Advances in imaging and electron physics, 2012 - Elsevier
Transmission electron imaging with standard scanning electron microscopes (SEMs) can be
implemented simply by equipping the SEM with a readily available transmission detector …

Cost and capability compromises in STEM instrumentation for low-voltage imaging

F Quigley, P McBean, P O'Donovan… - Microscopy and …, 2022 - academic.oup.com
Low-voltage transmission electron microscopy (≤ 80 kV) has many applications in imaging
beam-sensitive samples, such as metallic nanoparticles, which may become damaged at …