Unique properties of hydrogenated amorphous silicon (a-Si: H) such as the high light
absorption, lower defect density when compared with amorphous Si, the low temperature for …

Hydrogenated amorphous silicon and related alloys represent a special type of thin film
semiconductor material that has attracted much attention in the last decade. The scientific …

Amorphous silicon, and its more useful alloy form, hydrogenated amorphous silicon (a-Si:
H), has been the subject of investigation for more than three decades. A-Si: H is a lowcost …

Hydrogenated polymorphous silicon (pm-Si: H) is a new material obtained by plasma-
enhanced chemical vapour deposition by running the plasma close to powder formation …

The effect of rapid thermal annealing on the structural properties of hydrogenated
amorphous silicon (a-Si: H) as a function of annealing time and temperature is studied by …

It has been reported in previous works that using of RF 55 kHz PECVD method allows to
deposit microstructural inhomogeneous a-Si: H films at high deposition rate (10–20Å/c) and …

From solar cell application point of view, this chapter reviews the aspects of hydrogenated
amorphous silicon (a-Si: H) based materials. Spear and LeComer made the first a-Si: H films …

The effect of microstructure (in the sense of hydrogen bonding) and degree of disorder of the
silicon network on the optoelectronic properties of a-Si: H films is studied. The films were …

We have studied the effects of oxygen on hydrogenated amorphous/crystalline silicon films
in terms of their structural and optical properties. Different “hydrogenated silicon oxide”(SiO …

Hydrogenated amorphous silicon films have been prepared by planar rf magnetron
sputtering method. The effect of deposition temperature and the hydrogen dilution on the …