… for polysilicon films, although Munoz et at. performed such measurements on undoped bulk
… silicon rods. Here we report the results of our electrical measurements on poly silicon films …

… This paper reviews the present knowledge on silica films (SiO 2 ) on silicon … electrical and
physical properties of oxide layers grown on silicon carbide and we examine how silica films …

… bulk, and lead us to interpret the optical and electrical properties in terms of "… Si films. We
have undertaken an experimental survey of the structural, optical, and electrical properties of …

… In this paper we discuss electrical properties by analyses of the free carrier optical … silicon
films. The pulsed laser crystallization method is convenient to form polycrystalline silicon films …

… activity: we have crystallized Si film by Ni metal layer and … The optical and electrical properties
of these films have been … Optical and electrical properties of thin films are known to be …

… All the microcrystalline silicon films presented in this study were grown by the LBL technique
in a capacitively coupled single chamber reactor12 at the usual excitation frequency of …

… electrical characteristics of films grown on different substrate orientations have been described.
The purpose of this paper is to describe the electrical properties of silicon films … films of …

… standard preparation method for polysilicon films in IC manufacturing… electrical properties
of LPCVD polysilicon films have been reported (1, 2). It was concluded that polycrystalline films …

… been reported for silicon films on sapphire(Ss~50-52J and for germanium films on sapphire,(…
measurements with silicon films on sapphire agree well with the curves for silicon on spinel. …

… Nanocrystalline silicon films were deposited by radio frequency … 100 silicon at various
substrate temperatures, Ts . The detailed structural, optical, and electrical analysis of the films has …