Room temperature replication in spin on glass by nanoimprint technology

S Matsui, Y Igaku, H Ishigaki, J Fujita… - Journal of Vacuum …, 2001 - pubs.aip.org
A compact nanoimprint lithography (NIL) system using the driving power of a stepping motor
has been developed. Compared to a conventional NIL system with a hydraulic press, there …
被引用次数：123 相关文章

Room temperature replication in spin on glass by nanoimprint technology

S Matsui, H Ishigaki, J Fujita, M Ishida… - Journal of Vacuum …, 2001 - ui.adsabs.harvard.edu
A compact nanoimprint lithography (NIL) system using the driving power of a stepping motor
has been developed. Compared to a conventional NIL system with a hydraulic press, there …

[引用][C] Room temperature replication in spin on glass by nanoimprint technology

S Matsui, H Ishigaki, J Fujita, M Ishida… - Journal of Vacuum …, 2001 - cir.nii.ac.jp
[PDF] archive.org

[PDF][PDF] Room temperature replication in spin on glass by nanoimprint technology

S Matsui, H Ishigaki, J Fujita, M Ishida… - J. Vac. Sci …, 2001 - scholar.archive.org
Nanofabrication technologies are indispensable techniques for making quantum structure
devices such as singleelectron transistors. Electron beam lithography and dry etching are …

Room temperature replication in spin on glass by nanoimprint technology

S Matsui, H Ishigaki, J Fujita, M Ishida… - Journal of Vacuum …, 2001 - pubs.aip.org
A compact nanoimprint lithography (NIL) system using the driving power of a stepping motor
has been developed. Compared to a conventional NIL system with a hydraulic press, there …

[引用][C] Room temperature replication in spin on glass by nanoimprint technology

S MATSUI - J. Vac. Sci. Technol. B, 2001 - cir.nii.ac.jp