Reversible n-Type Doping of Graphene by H2O-Based Atomic-Layer Deposition and Its Doping Mechanism

L Zheng, X Cheng, Z Wang, C Xia, D Cao… - The Journal of …, 2015 - ACS Publications
The pre-H2O treatment and Al2O3 film growth under a two-temperature-regime mode in an
oxygen-deficient atomic layer deposition (ALD) chamber can induce n-type doping of …
被引用次数：22 相关文章
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[PDF][PDF] Reversible n‑Type Doping of Graphene by H2O‑Based Atomic-Layer Deposition and Its Doping Mechanism

L Zheng, X Cheng, Z Wang, C Xia, D Cao, L Shen… - J. Phys …, 2015 - researchgate.net
The pre-H2O treatment and Al2O3 film growth under a two-temperatureregime mode in an
oxygen-deficient atomic layer deposition (ALD) chamber can induce ntype doping of …