Electrostatic model for an asymmetric combdrive

JLA Yeh, CY Hui - Journal of Microelectromechanical systems, 2000 - ieeexplore.ieee.org
This paper presents an analytical solution to the electrostatic actuation of an asymmetric
combdrive in out-of-plane and torsional motions. The exact solutions to force in the out-of …

[引用][C] Electrostatic model for an asymmetric combdrive

JLA Yeh, CY Hui, NC Tien - Journal of Microelectromechanical Systems, 2000 - cir.nii.ac.jp
Electrostatic model for an asymmetric combdrive | CiNii Research CiNii 国立情報学研究所 学術
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[引用][C] Electrostatic model for an asymmetric combdrive

JLA YEH, CY HUI, NC TIEN - Journal of …, 1999 - pascal-francis.inist.fr
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Electrostatic model for an asymmetric combdrive

JLA Yeh, CY Hui, NC Tien - Journal of Microelectromechanical Systems, 2000 - hub.hku.hk
This paper presents an analytical solution to the electrostatic actuation of an asymmetric
combdrive in out-of-plane and torsional motions. The exact solutions to force in the out-of …

[引用][C] Electrostatic model for an asymmetric combdrive

JLA YEH, CY HUI, NC TIEN - Journal of …, 1999 - Institute of Electrical and Electronics …