Automatic identification of yield limiting layout patterns using root cause deconvolution on volume scan diagnosis data

WT Cheng, R Klingenberg, B Benware… - 2017 IEEE 26th …, 2017 - ieeexplore.ieee.org
in many cases, the main cause of yield loss is a specific layout pattern that is difficult to
manufacture and is prone to causing an open or short defect. This situation is getting worse …
被引用次数：15 相关文章

Automatic Identification of Yield Limiting Layout Patterns Using Root Cause Deconvolution on Volume Scan Diagnosis Data

WT Cheng, R Klingenberg, B Benware… - 2017 IEEE 26th Asian …, 2017 - iro.uiowa.edu
Abstract in many cases, the main cause of yield loss is a specific layout pattern that is difficult
to manufacture and is prone to causing an open or short defect. This situation is getting …

Automatic Identification of Yield Limiting Layout Patterns Using Root Cause Deconvolution on Volume Scan Diagnosis Data

WT Cheng, R Klingenberg, B Benware… - 2017 IEEE 26th Asian …, 2017 - computer.org
Abstract in many cases, the main cause of yield loss is a specific layout pattern that is difficult
to manufacture and is prone to causing an open or short defect. This situation is getting …

[引用][C] Automatic Identification of Yield Limiting Layout Patterns Using Root Cause Deconvolution on Volume Scan Diagnosis Data

WT Cheng, R Klingenberg, B Benware… - 2017 IEEE 26th Asian …, 2017 - cir.nii.ac.jp
Automatic Identification of Yield Limiting Layout Patterns Using Root Cause Deconvolution on
Volume Scan Diagnosis Data | CiNii Research CiNii 国立情報学研究所 学術情報ナビゲータ …