Thick-film fine pattern formation by a photolithographic process
IEEE Transactions on Components, Hybrids, and …, 1979 - ieeexplore.ieee.org
A printing process is generally used for pattern formation of· thick films. With this method,
however, it is difficult to achieve high yield production rates for pattern widths which are less …
however, it is difficult to achieve high yield production rates for pattern widths which are less …
[引用][C] THICK-FILM FINE PATTERN FORMATION BY A PHOTOLITHOGRAPHIC PROCESS
Y WATANABE, A ARITOMO, K WATANABE - 1979 - pascal-francis.inist.fr
THICK-FILM FINE PATTERN FORMATION BY A PHOTOLITHOGRAPHIC PROCESS CNRS
Inist Pascal-Francis CNRS Pascal and Francis Bibliographic Databases Simple search …
Inist Pascal-Francis CNRS Pascal and Francis Bibliographic Databases Simple search …