[HTML][HTML] A customized two photon fluorescence imaging probe based on 2D scanning MEMS mirror including electrothermal two-level-ladder dual S-shaped actuators

H Mehidine, M Li, JF Lendresse, F Bouvet, H Xie… - Micromachines, 2020 - mdpi.com
H Mehidine, M Li, JF Lendresse, F Bouvet, H Xie, D Abi Haidar
Micromachines, 2020mdpi.com
We report the design and characterization of a two-photon fluorescence imaging miniature
probe. This customized two-axis scanning probe is dedicated for intraoperative two-photon
fluorescence imaging endomicroscopic use and is based on a micro-electro-mechanical
system (MEMS) mirror with a high reflectivity plate and two-level-ladder double S-shaped
electrothermal bimorph actuators. The fully assembled probe has a total outer diameter of 4
mm including all elements. With a two-lens configuration and a small aperture MEMS mirror …
We report the design and characterization of a two-photon fluorescence imaging miniature probe. This customized two-axis scanning probe is dedicated for intraoperative two-photon fluorescence imaging endomicroscopic use and is based on a micro-electro-mechanical system (MEMS) mirror with a high reflectivity plate and two-level-ladder double S-shaped electrothermal bimorph actuators. The fully assembled probe has a total outer diameter of 4 mm including all elements. With a two-lens configuration and a small aperture MEMS mirror, this probe can generate a large optical scan angle of 24° with 4 V drive voltage and can achieve a 450 µm FOV with a 2-fps frame rate. A uniform Pixel Dwell Time and a stable scanning speed along a raster pattern were demonstrated while a 57-fs pulse duration of the excitation beam was measured at the exit of the probe head. This miniature imaging probe will be coupled to a two-photon fluorescence endomicroscope oriented towards clinical use.
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