We report an integrated microelectromechanical system (MEMS) with an on-chip heater for
in-situ mechanical testing of nanostructures from room to elevated temperatures.
Multiphysics simulation is used to predict the temperature distribution in air and vacuum
conditions. The temperature simulation in air agrees well with the measurement based on
Raman spectroscopy. Mechanical testing of single crystalline silicon nanowires is carried
out to investigate the brittle-to-ductile transition, demonstrating the efficacy of the MEMS …