… Abstract— This paper reports on the first time the design, simulation and fabrication of a
novel MEMS fluidic inertial sensor, which integrates a new three-axis gyroscope and singleaxis …

… While the sensing performances of the three axes are in the … In addition to the inertial sensing
application, our work can … integrate an inertial sensing component in their own micro-fluidic, …

… This paper reports a multi-axis inertial sensor based on thermal expansion principle. In
addition to the advantages of simple structure, low fabrication cost and high shock resistance, the …

… The measurement ranges of three-axes angular rates and three-axes accelerations … is
caused by the complex thermal fluidic motion in the sensor chamber. It has been theoretically …

… of a point from the NA and I the second moment of inertia. For such a compliant segment,
M tot … Using conservation of volume, the axial elongation ( Δ L ) wrt the total injected fluidic …

… This paper reports on a multi-axis fluidic inertial … fluidic network through four perpendicular
flow channels and a pump chamber at the center. In contrast, in our sensor, multi-axis sensing …

In this paper, we present the design and simulation of a microelectromechanical system (MEMS)-based
fluidic angular velocity sensor that can simultaneously detect two components of …

… or quartz inertial sensors, fluid inertial sensors use fluid as … A sensor rotates about an axis
that is orthogonal to the motion … The fluidic system is the first, and the transducer is what turns …

… in the inertial sensing and particular angular rate sensing where … common actuating source
in fluidic inertial sensors, is based on … Finally, the vortex flow based inertial sensor using two …

… two 5-axis inertial sensors, a new 6-axis inertial sensor based … It combines the advantages
of the fluidic inertial sensor and … Meanwhile, it is different from the 5-axis fluidic inertial sensor …