A single-electron injection device for CMOS charge qubits implemented in 22-nm FD-SOI

I Bashir, E Blokhina, A Esmailiyan… - IEEE Solid-State …, 2020 - ieeexplore.ieee.org
I Bashir, E Blokhina, A Esmailiyan, D Leipold, M Asker, E Koskin, P Giounanlis, H Wang…
IEEE Solid-State Circuits Letters, 2020ieeexplore.ieee.org
This letter presents a single-electron injection device for position-based charge qubit
structures implemented in 22-nm fully depleted silicon-on-insulator CMOS. Quantum dots
are implemented in local well areas separated by tunnel barriers controlled by gate
terminals overlapping with a thin 5-nm undoped silicon film. Interface of the quantum
structure with classical electronic circuitry is provided with single-electron transistors that
feature doped wells on the classic side. A small 0.7× 0.4 μm 2 elementary quantum core is …
This letter presents a single-electron injection device for position-based charge qubit structures implemented in 22-nm fully depleted silicon-on-insulator CMOS. Quantum dots are implemented in local well areas separated by tunnel barriers controlled by gate terminals overlapping with a thin 5-nm undoped silicon film. Interface of the quantum structure with classical electronic circuitry is provided with single-electron transistors that feature doped wells on the classic side. A small 0.7 ×0.4 μm 2 elementary quantum core is co-located with control circuitry inside the quantum operation cell which is operating at 3.5 K and a 2-GHz clock frequency. With this apparatus, we demonstrate a single-electron injection into a quantum dot.
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