Increased Internet of Things (IoT) technology has increased the number of IoT platform technology developments that are used to facilitate the development of IoT. But in the industrial era 4.0, the application of IoT to Smart Factory has evolved into a new paradigm, namely the Cyber-Physical System (CPS). Therefore, this paper aims to do a survey to determine the parameters and criteria to build a system and architecture of the CPS platform. Additionally, it surveys and analyzes using several parameters or criteria to compare several IoT platforms such as thing management, connectivity, data storage, data abstraction, interface, analytical, feedback & collaboration, security, scalability, microservices, plug, and play. The result shows that these parameters and criteria can be used as references to develop the CPS platform system. In the next step, we expected that the creation of a CPS platform can be based on references from the results of this research survey and analysis.