AIN thin film deposition by pulsed laser ablation of Al in NH3
AG Guidoni, A Mele, TM Di Palma, C Flamini… - Thin Solid Films, 1997 - Elsevier
Aluminium nitride films were synthesized by reaction of laser-evaporated Al in NH3
atmosphere. Optical multichannel emission spectroscopy (OMA) and intensified charge
coupled device (ICCD) imaging have been applied to in situ identification of deposition
precursors in the plasma plume moving from the target to the substrate. Mass spectrometry
has also been used to detect ionic species ejected from an Al target in a mixture with NH3.
Thin films prepared by this method were characterized by conventional techniques such as …
atmosphere. Optical multichannel emission spectroscopy (OMA) and intensified charge
coupled device (ICCD) imaging have been applied to in situ identification of deposition
precursors in the plasma plume moving from the target to the substrate. Mass spectrometry
has also been used to detect ionic species ejected from an Al target in a mixture with NH3.
Thin films prepared by this method were characterized by conventional techniques such as …
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