We report on new developments in wavefront and polarization control for ultrashort-pulse laser microprocessing. We use two Spatial Light Modulators in combination to structure the optical fields of a picosecond-pulse laser beam, producing vortex wavefronts and radial or azimuthal polarization states. We also carry out the first demonstration of multiple first-order beams with vortex wavefronts and radial or azimuthal polarization states, produced using Computer Generated Holograms. The beams produced are used to nano-structure a highly polished metal surface. Laser Induced Periodic Surface Structures are observed and used to directly verify the state of polarization in the focal plane and help to characterize the optical properties of the setup.