Deep x-ray lithography
… dose along the X-ray trajectory, including a 1400 mm thick PMMA foil X-ray mask with a
550 … Due to the fact that a dose profile is deposited during X-ray lithography and the GG …
550 … Due to the fact that a dose profile is deposited during X-ray lithography and the GG …
Recent developments in deep X-ray lithography
W Ehrfeld, A Schmidt - Journal of Vacuum Science & Technology B …, 1998 - pubs.aip.org
… We presented an overview of recent developments applying deep x-ray lithography as the
main fabrication step in the LIGA sequence. It was shown that the deeper understanding of …
main fabrication step in the LIGA sequence. It was shown that the deeper understanding of …
Deep X-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics
W Ehrfeld, H Lehr - Radiation Physics and Chemistry, 1995 - Elsevier
… Deep X-ray lithography is the most important fabrication step in the sequence of the LIGA …
of LIGA, gives a detailed description of deep X-ray lithography and presents an overview of the …
of LIGA, gives a detailed description of deep X-ray lithography and presents an overview of the …
High-aspect-ratio micromachining via deep X-ray lithography
H Guckel - Proceedings of the IEEE, 1998 - ieeexplore.ieee.org
… Thus, the Xray mask for low-energy exposures becomes a decorated membrane with many
… minimizing X-ray exposures and utilizing the inherent precision of deep X-ray lithography to …
… minimizing X-ray exposures and utilizing the inherent precision of deep X-ray lithography to …
Fabrication of photonic crystals by deep x-ray lithography
G Feiertag, W Ehrfeld, H Freimuth, H Kolle… - Applied Physics …, 1997 - pubs.aip.org
… In this letter, we report the fabrication of 3D photonic crystals with the x-ray lithography … of
deep x-ray lithography and the following steps will be briefly explained. Deep x-ray lithography …
deep x-ray lithography and the following steps will be briefly explained. Deep x-ray lithography …
Study of deep X-ray lithography behaviour for microstructures
MC Chou, CT Pan, TT Wu, CT Wu - Sensors and Actuators A: Physical, 2008 - Elsevier
… is exposed to X-ray radiation. Two … X-ray, at a dose of 800 mAmin/cm, passed through
the Be window and directly exposed the PMMA substrate; the PMMA exposed to the X-ray …
the Be window and directly exposed the PMMA substrate; the PMMA exposed to the X-ray …
Deep x-ray lithography for micromechanics
TR Christenson, H Guckel - … and Microfabrication Process …, 1995 - spiedigitallibrary.org
… deep x-ray lithography (DXRL), electroplating, and injection molding replication. The lithography
… storage ring to expose , an x-ray sensitive photoresist, typically polymethylmethacrylate (…
… storage ring to expose , an x-ray sensitive photoresist, typically polymethylmethacrylate (…
Deep X‐ray Lithography for Direct Patterning of PECVD Films
… An advanced lithographic technique which is based on direct writing of thin films by hard X-…
deposition and have been patterned using deep X-ray lithography with synchrotron light. The …
deposition and have been patterned using deep X-ray lithography with synchrotron light. The …
Deep X-ray lithography with the SU-8 resist
L Singleton, AL Bogdanov, S Peredkov… - … Lithographic …, 2001 - spiedigitallibrary.org
… Polymethylmethacrylate (PMMA) is the resist of choice for deep x-ray lithography. This is a
cornerstone technique in the LIGA process because diffraction, which is inversely proportional …
cornerstone technique in the LIGA process because diffraction, which is inversely proportional …
Deep X-ray lithography for micromechanics
H Guckel, KJ Skrobis, J Klein… - … Fabrication of Thin …, 1994 - spiedigitallibrary.org
… staffs of the Center for X-ray Lithography and the Synchrotron Radiation Center for their help
and the use of their facilities. The Center for X-ray Lithography is supported by SEMATECH …
and the use of their facilities. The Center for X-ray Lithography is supported by SEMATECH …
相关搜索
- deep x-ray lithography for micromechanics
- deep x-ray lithography aspect ratio
- structure quality in deep x-ray lithography
- deep x-ray lithography beamline
- material for deep x-ray lithography
- ultra-deep x-ray lithography
- deep x-ray lithography thick pmma
- deep x ray lithography pecvd films
- deep x-ray lithography cross-section transfer
- deep x ray lithography precision engineering
- deep x-ray lithography structure transfer
- deep x-ray lithography exposure station
- deep x-ray lithography three dimensional microstructures
- deep x-ray lithography experimental determination
- deep x-ray lithography photonic crystals
- deep x-ray lithography processing parameters