… dose along the X-ray trajectory, including a 1400 mm thick PMMA foil X-ray mask with a
550 … Due to the fact that a dose profile is deposited during X-ray lithography and the GG …

… We presented an overview of recent developments applying deep x-ray lithography as the
main fabrication step in the LIGA sequence. It was shown that the deeper understanding of …

… Deep X-ray lithography is the most important fabrication step in the sequence of the LIGA …
of LIGA, gives a detailed description of deep X-ray lithography and presents an overview of the …

… Thus, the Xray mask for low-energy exposures becomes a decorated membrane with many
… minimizing X-ray exposures and utilizing the inherent precision of deep X-ray lithography to …

… In this letter, we report the fabrication of 3D photonic crystals with the x-ray lithography … of
deep x-ray lithography and the following steps will be briefly explained. Deep x-ray lithography …

… is exposed to X-ray radiation. Two … X-ray, at a dose of 800 mAmin/cm, passed through
the Be window and directly exposed the PMMA substrate; the PMMA exposed to the X-ray …

… deep x-ray lithography (DXRL), electroplating, and injection molding replication. The lithography
… storage ring to expose , an x-ray sensitive photoresist, typically polymethylmethacrylate (…

… An advanced lithographic technique which is based on direct writing of thin films by hard X-…
deposition and have been patterned using deep X-ray lithography with synchrotron light. The …

… Polymethylmethacrylate (PMMA) is the resist of choice for deep x-ray lithography. This is a
cornerstone technique in the LIGA process because diffraction, which is inversely proportional …

… staffs of the Center for X-ray Lithography and the Synchrotron Radiation Center for their help
and the use of their facilities. The Center for X-ray Lithography is supported by SEMATECH …