[PDF][PDF] Defect reduction in m-plane GaN on m-sapphire via lateral epitaxial overgrowth by hydride vapor phase epitaxy

M Kim, S Woo, B So, KB Shim… - Journal of Ceramic …, 2016 - researchgate.net
M Kim, S Woo, B So, KB Shim, O Nam
Journal of Ceramic Processing Research, 2016researchgate.net
We report on the improvement of the structural and optical properties of m-plane GaN layers
on m-plane sapphire via epitaxial lateral overgrowth (ELO) using hydride vapor phase
epitaxy. The planar m-plane GaN was compared to ELO mplane GaN with stripes patterned
along the [1120] and [0001], respectively. The ELO m-plane GaN samples showed narrow x-
ray rocking curves and more improved cathodoluminescence (CL) images compared with
those of the planar m-plane GaN. The density of threading dislocations (TDs) and basal …
We report on the improvement of the structural and optical properties of m-plane GaN layers on m-plane sapphire via epitaxial lateral overgrowth (ELO) using hydride vapor phase epitaxy. The planar m-plane GaN was compared to ELO mplane GaN with stripes patterned along the [1120] and [0001], respectively. The ELO m-plane GaN samples showed narrow x-ray rocking curves and more improved cathodoluminescence (CL) images compared with those of the planar m-plane GaN. The density of threading dislocations (TDs) and basal-plane stacking faults (BSFs) was decreased in the ELO m-plane GaN, which was confirmed by transmission electron microscopy (TEM) and Williamson-Hall (WH) plot analysis.
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