Design and fabrication of PCB based planar micro-coil for magnetic MEMS actuator
2014 IEEE International Conference on Semiconductor Electronics …, 2014•ieeexplore.ieee.org
This paper describes the design and fabrication of planar micro-coil on printed-circuit board
(PCB) for magnetic MEMS actuator. A simple and cost effective technique for the fabrication
of planar micro-coil is presented. The design and analysis process have been carried out by
using COMSOL Multiphysics 4.2. Three different coil dimensions such as width/space=
150μm/100μm; 100μm/100μm and 50μm/100μm, have been analyzed in order to find the
optimum coil geometry. The results showed that the coil with dimension of width/space of …
(PCB) for magnetic MEMS actuator. A simple and cost effective technique for the fabrication
of planar micro-coil is presented. The design and analysis process have been carried out by
using COMSOL Multiphysics 4.2. Three different coil dimensions such as width/space=
150μm/100μm; 100μm/100μm and 50μm/100μm, have been analyzed in order to find the
optimum coil geometry. The results showed that the coil with dimension of width/space of …
This paper describes the design and fabrication of planar micro-coil on printed-circuit board (PCB)for magnetic MEMS actuator. A simple and cost effective technique for the fabrication of planar micro-coil is presented. The design and analysis process have been carried out by using COMSOL Multiphysics 4.2. Three different coil dimensions such as width/space= 150μm/100μm; 100μm/100μm and 50μm/100μm, have been analyzed in order to find the optimum coil geometry. The results showed that the coil with dimension of width/space of 50μm/100μm produced the highest magnetic flux density of max 0.0068 T. The optimized design of the planar micro-coil can be used as a reference for the future fabrication of magnetic MEMS actuator.
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