Design of free patterns of nanocrystals with ad hoc features via templated dewetting

M Aouassa, I Berbezier, L Favre, A Ronda… - Applied Physics …, 2012 - pubs.aip.org
Design of monodisperse ultra-small nanocrystals (NCs) into large scale patterns with ad hoc
features is demonstrated. The process makes use of solid state dewetting of a thin film
templated through alloy liquid metal ion source focused ion beam (LMIS-FIB)
nanopatterning. The solid state dewetting initiated at the edges of the patterns controllably
creates the ordering of NCs with ad hoc placement and periodicity. The NC size is tuned by
varying the nominal thickness of the film while their position results from the association of …
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